Detail výsledku

Methods of measurement of capacitive pressure sensors

BEČVÁŘ, D., HUBÁLEK, J., VRBA, R., MUSIL, V. Methods of measurement of capacitive pressure sensors. In Electronic devices and systems 01 - Proceedings. Brno: Ing. Zdeněk Novotný, CSc., 2001. 6 p. ISBN: 80-214-1960-1.
Typ
článek ve sborníku konference
Jazyk
angličtina
Autoři
Bečvář Daniel, Ing., Ph.D., UMEL (FEKT)
Hubálek Jaromír, prof. Ing., Ph.D., FEKT (FEKT)
Vrba Radimír, prof. Ing., CSc.
Musil Vladislav, prof. Ing., CSc.
Abstrakt

Novel methods of pressure measurement of capacitive sensors are presented. All of them are shown as very suitable for on-chip realisations. The very small capacity measurement, high resolution and auto-calibrated techniques are described in this paper.

Klíčová slova anglicky

measurement methods, capacitive sensor, pressure sensor, integrated circuit

Rok
2001
Strany
6
Sborník
Electronic devices and systems 01 - Proceedings
Vydání
1
Konference
8th Electronic Devices and Systems Conference 2001
ISBN
80-214-1960-1
Vydavatel
Ing. Zdeněk Novotný, CSc.
Místo
Brno
BibTeX 
@inproceedings{BUT2847,
  author="Daniel {Bečvář} and Jaromír {Hubálek} and Radimír {Vrba} and Vladislav {Musil}",
  title="Methods of measurement of capacitive pressure sensors",
  booktitle="Electronic devices and systems 01 - Proceedings",
  year="2001",
  number="1",
  pages="6",
  publisher="Ing. Zdeněk Novotný, CSc.",
  address="Brno",
  isbn="80-214-1960-1"
}
Pracoviště
Ústav mikroelektroniky (UMEL)
Nahoru