Detail výsledku

Carbon nanotubes in pressure sensors

FICEK, R.; VRBA, R.; JAŠEK, O.; ELIÁŠ, M.; ZAJÍČKOVÁ, L. Carbon nanotubes in pressure sensors. In EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING. Brno: Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105, 2007. p. 178-182. ISBN: 978-80-214-3470-7.
Typ
článek ve sborníku konference
Jazyk
angličtina
Autoři
Ficek Richard, Ing., UMEL (FEKT)
Vrba Radimír, prof. Ing., CSc., UAMT (FEKT), UMEL (FEKT)
Jašek Ondřej, Mgr., Ph.D.
Eliáš Marek, Mgr., Ph.D., UMEL (FEKT)
Zajíčková Lenka, Mgr., Ph.D.
Abstrakt

In this paper a new research and development of the pressure sensors utilizing carbon
nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface
increase element in capacitance sensor are presented. Both sensors consisted of the
two parts; elastic electrode-sensing film fabricated by wet anisotropic etching
process and solid electrode. The emission sensor has elastic anode electrode with
membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the
vacuum chamber. The capacitance sensor has the same topology extensive by CNT
on both electrodes without vacuum chamber. The MWCNTs were grown by plasma
enhanced chemical vapour deposition (PECVD).

Klíčová slova

carbon nanotubes, field emission, pressure sensor

Rok
2007
Strany
178–182
Sborník
EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING
Vydání
první
Konference
Electronic Devices and Systems EDS`07 IMAPS CS International Conference 2007
ISBN
978-80-214-3470-7
Vydavatel
Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105
Místo
Brno
BibTeX 
@inproceedings{BUT27858,
  author="Richard {Ficek} and Radimír {Vrba} and Ondřej {Jašek} and Marek {Eliáš} and Lenka {Zajíčková}",
  title="Carbon nanotubes in pressure sensors",
  booktitle="EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING",
  year="2007",
  number="první",
  pages="178--182",
  publisher="Ing. Zdeněk Novotný CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="978-80-214-3470-7"
}
Pracoviště
Ústav mikroelektroniky (UMEL)
Nahoru